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Electronic grade Phosphorus Oxychloride(POCl₃)
1.    Chemical formula: POCl               
2.    2.Relative molecular mass: 153.33
3.    Physical& chemical properties
       Colorless transparent fuming liquid with a strong pungent odor. Easily hydrolyzed in moist air to produce phosphoric acid and hydrochloric acid. Mp 1.25 °ś, boiling point 105.1 °ś, relative density was 1.675 g/ml. Evaporative heat 33.7kJ / mol. Keep stable when it°Įs close to 300 °ś,. Explode encountered plenty of water. Toxic and corrosive.
4.    Application
       Mainly used for chip N type doping, it's liquid source of phosphorus for integrated circuits, solar cells, optical fiber preform, separation devices, it's necessary electronic chemicals in chip manufacturing process.

5.    Specifications    

Item Specification 
w/£®¶Őg/kg£©
Item Specification 
w/£®¶Őg/kg£©
6N 7N 6N 7N
Al,max 20 5 Mn,max 20 1
Sb,max 10 3 Hg,max 10 5
As,max 15 6 Ni,max 10 1
Ba,max 10 1 Nb,max 2 1
Bi,max 10 1 K, max 20 3
Cd,max 10 3 Ag,max 1 1
Ca,max 20 5 Na,max 10 5
Cr,max 10 1 Sn,max 5 1
Co,max 10 1 Sr,max 5 1
Cu,max 20 2 Ti,max 5 2
Ga,max 1 1 V,max 10 2
Au,max 1 1 Zn,max 5 1
Fe,max 30 5 Assay£®%£©min 99.9 99.9
Pb,max 10 3 Purity w/%,min 99.999 9% 99.999 99%
Li,max 10 6 Chroma£¨/£®APHA£© max 5 5
Mg,max 10 5 Particles°›0.3¶Őm  max 50 p/ml 50 p/ml

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