Trans 1, 2-Dichloroethylene (DCE, Electronic Grade)
Molecular Formula: C2H2Cl2
Molecular Weight:96.94
Physical and Chemical Properties
Colorless, transparent liquid with irritating odor. Melting point: -57℃. Boiling point: 48℃. Density: 1.265g/ml. Incompatible with oxidizing agents, bases. Stable, but may decompose on exposure to air, moisture or light.Highly flammable.
Applications
Acts as a high purity ozone-safe liquid chlorine source for use in silicon oxidation and tube cleaning in semiconductor industries, solar cell, semiconductor discrete devices’ fabrication and MEMS (Micro-Electro-Mechanical Systems). For CVD process at lower temperatureless than 800℃，Trans 1, 2-Dichloroethylene is better than any other known chlorine sources.
Specifications
|
Analytical Item |
Specification |
Analytical Item |
Specification |
|
Purity |
99.999995%（7.5N） |
Na max |
0.2ppb |
|
Al max |
0.2ppb |
Ni max |
0.1ppb |
|
Ag max |
0.1ppb |
Nb max |
0.1ppb |
|
As max |
0.1ppb |
P max |
0.9ppb |
|
Au max |
0.1ppb |
Pb max |
0.1ppb |
|
B max |
1.0ppb |
Sb max |
0.1ppb |
|
Ba max |
0.1ppb |
Sn max |
0.1ppb |
|
Bi max |
0.1ppb |
Si max |
0.9ppb |
|
Ca max |
0.4ppb |
Sr max |
0.1ppb |
|
Cd max |
0.1ppb |
Ti max |
0.1ppb |
|
Co max |
0.1ppb |
Zn max |
0.1ppb |
|
Cu max |
0.1ppb |
Assay |
99.97% |
|
Cr max |
0.1ppb |
Acidity(HCl) max |
5ppm |
|
Fe max |
0.5ppb |
Water(H2O) max |
15ppm |
|
Ga max |
0.1ppb |
Particles≥0.1µm max |
5p/ml |
|
Hg max |
0.1ppb |
Particles≥0.2µm max |
3p/ml |
|
K max |
0.1ppb |
Particles≥0.5µm max |
1p/ml |
|
Li max |
0.1ppb |
Color |
＜10APHA |
|
Mg max |
0.1ppb |
Appearance |
Colorless,clear liquid |
|
Mn max |
0.1ppb |
Shelf Life |
24 months |
Package
Container: Quartz Bubbler
Net Content:1500ml
Packaging: Metal Drum